Xyris 4000 CL (or WL) System Example
The Xyris 4000 CL (confocal laser) is a compact state of the art surface profiling system that is capable of measuring form and thickness of various surfaces. It incorporates a CCD camera for on screen viewing of the surface under investigation, helping to identify areas or features of interest quickly and easily. The WL (white light) sensor offers increased performance for spherical or aspherical surface measurement.
Xyris 4000 CL – 25mm XYZ motion system – CL sensor
has integrated microscope video camera to assist in
targeting the system
Silicon MEMS device measurement using the Xyris 4000CL
(area 60µm x 60µm). The trenches are approximately 3µm
wide and 8µm deep.
Motion Table Specifications
Travel |
Resolution |
Feedback |
Bidirectional Repeatability |
Max Speed |
25mm |
0.1μm |
Linear encoder |
0.2 μm (over full 25mm range) |
25mm/sec |
0.01μm* |
Type |
Illumination Source |
Spot size |
Measurement Range |
Stand Off Distance |
Sensor Resolution |
Sampling rate |
CL |
670nm Laser (Visible Red) |
2μm |
0.6mm |
6mm |
0.01μm |
1.4kHz |
WL |
Poly Chromatic Halogen |
7μm |
0.35mm |
15mm |
0.01μm |
1kHz |