MEMS - Surface Micro-Machined Resonator

The image below shows a scan on a surface micro-machined resonator,
350 x 350 µm - 351 x 351 data points. The data was acquired with a Xyris 4000 (confocal laser)

By numeric levelling the data set can be aligned. The following image gives an indication of the flatness of the surface.

The trenches in the lower left corner have been magnified in a second measurement and are shown here over an area of 60 x 60 µm with 201 x 201 data points.

The left image below displays a cross-section through the structure along the vertical yellow line in the right image (please note that neither the left, nor the right image are to scale).

The depth of the trenches is 4 µm, their width is 7 µm.